[Issue]
The dry process for resist stripping sometimes requires initial seasoning using approximately 80 dummy wafers. This initial seasoning before resist stripping poses challenges in terms of time consumption, power usage, costs due to the large number of dummy wafers consumed, and overall efficiency.
[How to solve]
Our service, leveraging IK Corporation’s proprietary technology, applies a special pre-treatment and plasma treatment to the surface of the baffle plate, significantly reducing the costs associated with initial seasoning. Uniformity for each product is also improved, achieving results equal to or better than conventional methods. In addition to refurbish used substrates entrusted by customers, we can also provide new baffle plates / shower head for certain product numbers.
