【Issue】: After chamber cleaning, moisture adhering to metal parts inside the chamber and gas piping reacts with the process gas to generate hydrochloric acid (HCl), causing corrosion and the generation of metal ions and particles.
【Results of applying Silcotek Coat】: The hydrophobic amorphous silicon oxide coating prevents moisture from adhering and prevents the generation of HCl. Reducing corrosion shortens maintenance downtime and reduces equipment running costs.
