IK Innovation Recycling of Baffle Product / Shower Head
Recycling of Baffle Product
Including Baffle Aging Technology
IK Innovation enables significant reduction of dummy wafers and processing time required for the initial seasoning (dummy run) of baffle plates and showerheads in the ashing process by using their self-developed equipment and proprietary aging recipe.
In addition to regenerating used substrates entrusted by customers, we can also provide new substrates for certain product numbers.
IK’s self-developed equipment uses a single-wafer (individual) processing method.
By applying special pre-treatment and plasma treatment to the surface of each wafer in this single-wafer process, uniformity for each product is improved, achieving results equal to or better than conventional methods.
Recycling of Baffle Product including Baffle Aging Technology
OEM新品との比較データ
After PM, a special pre-treatment and plasma treatment are applied to the surface of the showerhead to restore the internal condition of the chamber to a state close to its previous condition.
The conventional (OEM) vacuum plasma method, being batch-based, had the drawback of significant uniformity variation between layers and individual products.
Therefore, IK’s proprietary equipment uses a single-wafer (individual) processing method, applying special pre-treatment and plasma treatment to the product surface, which improves uniformity for each product and achieves results equal to or better than the conventional method.
