Epi parts for front process
Schunk Xycarb Technology
Pure Excellence
- Graphite parts and Quartz parts for epitaxial growth
- Certified manufacturer of graphite parts for ASM Epsilon
- High purity, high accuracy machining technology
- Unique CVD SiC technology
- Actual sales in Japan more than 30 years
- Minimize part to part difference with thanks to production automation plan
- High-quality silicon wafers through epitaxial processing
- Extend to various semiconductor applications
- Stable supply of parts for 300mm wafers
