ESC Refurbishment Service
ESC Refurbishment Service
ESC refurbishment services for various CVD, PVD, and etching equipment
We also offer refurbishment services for electrostatic chucks (ESCs) used in semiconductor manufacturing equipment.
Partnering with a trusted company that has decades of proven experience and expertise, we support a wide range of ESC types for both 200mm and 300mm platforms.
With the capability to refurbish different ESC models, our services are trusted by leading semiconductor manufacturers around the world for their quality, reliability, and cost efficiency.
We provide effective solutions that help reduce operational costs while maximizing equipment uptime.
Lam/Novellus
Speed :
02-267289-00、 02-343750-00、 15-265814-00
374 :
839-019090-374、 715-014790-374
ULVAC
Entron :
Silicone-290-TCA-NT-02
Mattson
E-HLDS :
VAEY300A
p-E :
3004863-4-A、3006763-2
AMAT
eMax CT+ :
0040-63476、0040-49504
DPS-Ⅱ:
0040-33215
Charger :
0041-11565、0041-52042、0041-08852
HDP :
0041-43898、0040-48594
Mesa :
0041-75950
Endura :
0010-03254、0010-01286
PSK
Cooling stage :
DES00*
