SilcoTek Corrosion and Deposit-Resistant Coating

Amorphous silicon CVD coating

Coating is possible for piping and semiconductor manufacturing equipment parts

 

  • The US-patented CVD coating structure provides outstanding corrosion prevention and chemical resistance.
  • It applies a thin, uniform coating to complex-shaped pipes and fittings, as well as custom-made equipment.
  • It forms a seamless, full-surface coating even on the inside of pipes with very high aspect ratios.
  • It can be coated on a variety of substrates, including stainless steel, Hastelloy, glass, and ceramic.
  • It extends the life of semiconductor manufacturing equipment parts (Etch, CVD, ALD, abatement equipment, etc.).
  • The inert coating effectively prevents pipe clogging due to deposits.

 

  • Thin coating (approximately 1 um)
  • High conformability (uniform coating even on long, narrow or curved pipes)
  • Dense coating film made from amorphous silicon
  • Non-PFAS coating